Contaminant-free gas for manufacturing semiconductors
In the field of semiconductors, various high-purity gases are used at each manufacturing stage, e.g. in the formation of oxide film and dry etching and as the ambient gas for single crystal culture. For the manufacturing of super-LSI through hyperfine processing with submicron accuracy, clean stainless-steel valves are used which produce no micro-dust, moisture content or oil. These stainless steel valves greatly enhance product yield.